Perfluoroelastomer (FFKM

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Product Name: Perfluoroelastomer (FFKM
Product Type: other brand
Exhibitors: SEEFAR
Product Documentation: No Related Documents

Brief

Perfluoroelastomers are a type of synthetic rubber having even greater heat and chemical resistance than the fluoroelastomers. Perfluoroelastomers are widely used as seals on semiconductor wafer proce


Perfluoroelastomer (FFKM  A detailed description of
Properties of Perfluoroelastomers (FFKM)
  • This rubber has extraordinary resistance to harsh chemicals and heat.
  • They are enable to withstand virtually any process media, including reactive plasmas, at temperatures as high as 327°C.
  • In plasma and chemical vapor deposition applications, perfluoroelastomers can withstand long term exposure in etching, stripping and cleaning processes.
  • In wet chemical operations, swelling due to prolonged chemical exposure and poor elastic recovery are frequent causes of seal failure. These inadequacies are eliminated in perfluoroelastomers.
  • The reliability of seals made from perfluoroelastomers leads to reduced wafer yield losses and lowered frequency of maintenance and operations disruptions.

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