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Organic Fluorine
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Fluororesin
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Perfluorinated Ethylene-Propylene Copolymer
Perfluoroelastomer (FFKM
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Product Name:
Perfluoroelastomer (FFKM
Product Type:
other brand
Exhibitors:
SEEFAR
Product Documentation:
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Brief
Perfluoroelastomers are a type of synthetic rubber having even greater heat and chemical resistance than the fluoroelastomers. Perfluoroelastomers are widely used as seals on semiconductor wafer proce
Perfluoroelastomer (FFKM
A detailed description of
Properties of Perfluoroelastomers (FFKM)
This rubber has extraordinary resistance to harsh chemicals and heat.
They are enable to withstand virtually any process media, including reactive plasmas, at temperatures as high as 327°C.
In plasma and chemical vapor deposition applications, perfluoroelastomers can withstand long term exposure in etching, stripping and cleaning processes.
In wet chemical operations, swelling due to prolonged chemical exposure and poor elastic recovery are frequent causes of seal failure. These inadequacies are eliminated in perfluoroelastomers.
The reliability of seals made from perfluoroelastomers leads to reduced wafer yield losses and lowered frequency of maintenance and operations disruptions.
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